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in capacitive sensing structures, mark all the correct statements: a) varying-gap capacitive pressure sensors have a non-linear response. b) most effective way to increase the dynamic range of a varying-gap capacitive pressure sensor is to reduce the gap between two capacitive plates. c) varying-overlap capacitive sensing structures can give both high linearity and high sensitivity as compared with varying-gap capacitive sensing structures. d) control of the built-in stress in the sensing membrane of the capacitive pressure sensors is the easiest way of customizing the sensitivity.
Sagot :
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