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Silicon wafer is susceptible to warping when the wafer is subjected to a temperature difference across its thickness. Thus, steps needed to be taken to prevent the temperature gradient across the wafer thickness from getting large. As an engineer in a semiconductor company, your task is to determine the maximum allowable heat flux on the bottom surface of the wafer while maintaining the upper surface temperature at 27°C. To prevent the wafer from warping, the temperature difference across its thickness of 500μm cannot exceed 1°C.
